×

Solid damping in micro electro mechanical systems. (English) Zbl 1163.74494

Summary: This paper focuses on the problem of the numerical evaluation of dissipation induced by thermoelastic coupling in microelectromechanical systems. An ad hoc conceived, FE based, numerical procedure for the evaluation of the thermoelastic dissipation is proposed and the numerical results are compared with analytical solutions. In order to introduce in the numerical response a dependence on the size of the resonating devices, which is experimentally observed at very small dimensions, a new enhanced non-local coupled thermoelastic model is proposed and the first results are discussed.

MSC:

74F15 Electromagnetic effects in solid mechanics
74F05 Thermal effects in solid mechanics
74M25 Micromechanics of solids

Software:

ARPACK
PDFBibTeX XMLCite
Full Text: DOI

References:

[1] Abdolvand R, Ho GK, Erbil A, Ayazi F (2003) Thermoelastic damping in trench-refilled polysilicon resonators. In: Proceedings of transducers ’03, p 324
[2] Clough RW, Penzien J (1993) Dynamics of structures. McGraw-Hill, Singapore
[3] Desoer CA, Kuh ES (1969) Basic circuit theory. McGraw-Hill, New York
[4] Eringen AC (1972) Linear theory of nonlocal elasticity and dispersion of plane waves. Int J Eng Sci 10:425–435 · Zbl 0241.73005 · doi:10.1016/0020-7225(72)90050-X
[5] Eringen AC (1987) Theory of nonlocal elasticity and some applications. Res Mech 21:313–342
[6] Eringen AC, Edelen DGB (1972) On nonlocal elasticity. Int J Eng Sci 10:233–248 · Zbl 0247.73005 · doi:10.1016/0020-7225(72)90039-0
[7] Frangi A, Spinola G, Vigna B (2006) On the evaluation of damping in MEMS in the slip-flow regime. Int J Numer Methods Eng 68:1031 · Zbl 1127.76020 · doi:10.1002/nme.1749
[8] Gardner WJ, Varadan VK, Awadelkarim OO (2001) Microsensor, MEMS and smart devices. Wiley, Chichester
[9] Hao Z, Erbil A, Ayazi F (2003) An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations. Sens Actuators A 109:156 · doi:10.1016/j.sna.2003.09.037
[10] Jackson RG (2004) Novel sensors and sensing. CRC Press, Boca Raton
[11] Le Foulgoc B, Bourouina T, Le Traon O, Bosseboeuf A, Marty F, Breluzeau C, Grandchamp J-P, Masson S (2006) Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor. J Micromech Microeng 16:S45 · doi:10.1088/0960-1317/16/6/S08
[12] Lehoucq RB, Sorensen DC, Yang C (1998) ARPACK users’ guide: solution of large-scale eigenvalue problems with implicitly restarted Arnoldi methods. SIAM, Philadelphia · Zbl 0901.65021
[13] Lifshitz R, Roukes ML (2000) Thermoelastic damping in micro- and nanomechanical systems. Phys Rev B 61:5600 · doi:10.1103/PhysRevB.61.5600
[14] Mohanty P, Harrington DA, Ekinci KL, Yang YT, Murphy MJ, Roukes ML (2002) Intrinsic dissipation in high frequency micromechanical resonators. Phys Rev B 66:085416 · doi:10.1103/PhysRevB.66.085416
[15] Polizzotto C (2001) Nonlocal elasticity and related variation principles. Int J Solids Struct 38:7359 · Zbl 1014.74003 · doi:10.1016/S0020-7683(01)00039-7
[16] Peddieson J, Buchanan GR, McNitt RP (2003) Application of nonlocal continuum models to nanotechnology. Int J Eng Sci 41:305 · doi:10.1016/S0020-7225(02)00210-0
[17] Senturia SD (2001) Microsystem design. Kluwer Academic, Dordrecht
[18] Tisseur F, Meerbergen K (2001) The quadratic eigenvalue problem. SIAM Rev 43:235 · Zbl 0985.65028 · doi:10.1137/S0036144500381988
[19] Wilkinson JH (1979) Kronecker’s canonical form and the QZ algorithm. Linear Algebra Appl 28:285 · Zbl 0458.65022 · doi:10.1016/0024-3795(79)90140-X
[20] Yasumura KY, Stowe DT, Chow EM, Pfafman T, Kenny TW, Stipe BC, Rugar D (2000) Quality factor in micron- and submicron-thick cantilevers. J MEMS 9:117
[21] Zener C (1937) Internal friction in solids, I: theory of internal friction in reeds. Phys Rev 52:230 · JFM 63.1341.03 · doi:10.1103/PhysRev.52.230
This reference list is based on information provided by the publisher or from digital mathematics libraries. Its items are heuristically matched to zbMATH identifiers and may contain data conversion errors. In some cases that data have been complemented/enhanced by data from zbMATH Open. This attempts to reflect the references listed in the original paper as accurately as possible without claiming completeness or a perfect matching.