@article {IOPORT.50218240,
    author       = {K\"arkk\"ainen, Anu and Awan, Shakil A. and Kyyn\"ar\"ainen, Jukka and Pekko, Panu and Oja, Aarne S. and Sepp\"a, Heikki},
    title        = {Optimized design and process for making a DC voltage reference based on MEMS},
    year         = {2005},
    journal      = {IEEE T. Instrumentation and Measurement},
    volume       = {54},
    number       = {2},
    pages        = {563-566},
    doi          = {10.1109/TIM.2004.843097},
    identifier   = {50218240},
}