@article {IOPORT.05409472,
    author       = {Grogg, Daniel and Badila-Ciressan, Nicoleta Diana and Ionescu, Adrian Mihai},
    title        = {Fabrication of MEMS resonators in thin SOI.},
    year         = {2008},
    journal      = {Computing Research Repository (CoRR)},
    volume       = {2008},
    pages        = {Article No. 0802.3040},
    publisher    = {Association for Computing Machinery, New York, NY; Cornell University, Ithaka, NY},
    identifier   = {05409472},
}