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Porous alumina based capacitive MEMS RH sensor. (English)
Comput. Res. Repos. 2008, Article No. 0805.0857 (2008).
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Usage of porous al2o3 layers for RH sensing. (English)
Comput. Res. Repos. 2008, Article No. 0802.3041 (2008).
WorldCat.org
2
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