id: 70479796
dt: a
an: 70479796
au: Fan, Xuejiao; Zhang, Dacheng
ti: Parameter characterization of anodic bonded electrical interconnect in
    MEMS/NEMS devices
so: NEMS, 198-201 (2009).
py: 2009
pu: 
la: EN
cc: 
ut: 
ci: 
li: http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068558