id: 70479723
dt: a
an: 70479723
au: Lee, Chi-Yuan; Lee, Shuo-Jen; Shih, Wen-Pin; Lin, Chen-Hen; Chang,
    Chi-Chung; Chang, Pei-Zen
ti: Fabrication of micro temperature sensor and heater in a stainless
    steel-based micro reformer
so: NEMS, 172-175 (2009).
py: 2009
pu: 
la: EN
cc: 
ut: 
ci: 
li: http://doi.ieeecomputersociety.org/10.1109/NEMS.2009.5068552