id: 70897496
dt: a
an: 70897496
au: Fu, Mengying; Haghnevis, Moeed; Askin, Ronald; Fowler, John; Zhang, Muhong
ti: Machine qualification management for a semiconductor back-end facility
so: Winter Simulation Conference, 2486-2492 (2010).
py: 2010
pu: 
la: EN
cc: 
ut: 
ci: 
li: doi:10.1109/WSC.2010.5678944