70868251

a

70868251 Miyazaki, Chuichi Shimamoto, Haruo Uematsu, Toshihide Abe, Yoshiyuki Kitaichi, Kosuke Morifuji, Tadahiro Yasunaga, Shoji Development of high accuracy wafer thinning and pickup technology for thin wafer 3DIC, 1-4 (2010). 2010 EN

doi:10.1109/3DIC.2010.5751470