50132076

j

50132076 Zhan, Nian Poon, M. C. Wong, Hei Ng, K. L. Kok, Chi-Wah Dielectric breakdown characteristics and interface trapping of hafnium oxide films Microelectronics Journal 36, No. 1, 29-33 (2005). 2005 EN

doi:10.1016/j.mejo.2004.10.006