id: 50212693
dt: j
an: 50212693
au: Chen, Jyh-Horng; Fu, Li-Chen; Lin, Ming-Hung; Huang, An-Chih
ti: Petri-net and GA-based approach to modeling, scheduling, and performance
    evaluation for wafer fabrication
so: IEEE Transactions on Robotics 17, No. 5, 619-636 (2001).
py: 2001
pu: 
la: EN
cc: 
ut: 
ci: 
li: doi:10.1109/70.964663