id: 70895127
dt: a
an: 70895127
au: Rose, Oliver
ti: Modeling tool failures in semiconductor fab simulation
so: Winter Simulation Conference, 1910- (2004).
py: 2004
pu: 
la: EN
cc: 
ut: 
ci: 
li: http://www.informs-sim.org/wsc04papers/254.pdf