70255125

a

70255125 Wu, Xiao-Ming Zhang, Ning-Xin Ren, Tianling Liu, Litian Nondestructive evaluation of MEMS devices by laser confocal measurements ICMENS, 69-76 (2005). 2005 EN

http://doi.ieeecomputersociety.org/10.1109/ICMENS.2005.87