@misc {IOPORT.70166023,
    author       = {Abbate, Nunzio and Basile, Adriano and Ciardo, S. and Faulisi, Alessandro and Guastella, C. and Lo Presti, M. and Macina, G. and Testa, N.},
    title        = {Wafer handling demo by SERPC},
    howpublished = {CLAWAR, 615-622 (2005).},
    year         = {2005},
    doi          = {10.1007/3-540-26415-9_74},
    identifier   = {70166023},
}