id: 50263974
dt: j
an: 50263974
au: Peng, Yao; Zhang, Jinyu; Wang, Yan; Yu, Zhiping
ti: Gradient-based source and mask optimization in optical lithography
so: IEEE Transactions on Image Processing 20, No. 10, 2856-2864 (2011).
py: 2011
pu: 
la: EN
cc: 
ut: 
ci: 
li: doi:10.1109/TIP.2011.2131668