\input zb-basic
\input zb-ioport
\iteman{io-port 50233652}
\itemau{Zaghloul, Usama; Papaioannou, George; Bhushan, Bharat; Coccetti, Fabio; Pons, Patrick; Plana, Robert}
\itemti{On the reliability of electrostatic NEMS/MEMS devices: review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies}
\itemso{Microelectronics Reliability 51, No. 9-11, 1810-1818 (2011).}
\itemcc{}
\itemut{}
\itemli{doi:10.1016/j.microrel.2011.07.081}
\end