50132307

j

50132307 Harmatha, L. Tapajna, M. Slugen, V. Ballo, P. P{\'\i}secn\'y, P. Sik, J. K\"ogel, G. Czochralski-grown nitrogen-doped silicon: electrical properties of MOS structures; A positron annihilation study Microelectronics Journal 37, No. 4, 283-289 (2006). 2006 EN

doi:10.1016/j.mejo.2005.04.059